Magnetic suspension turbine vacuum pump is a kind of high efficiency vacuum pump, which can operate stably under high temperature, high pressure and corrosion. This paper will analyze the working principle of magnetic suspension turbine vacuum pump from four aspects, namely structure, magnetic bearing, turbine and cooling system.

1. Structure

Magnetic suspension turbine vacuum pump is composed of main body, turbine, motor, cooling system and control system. The main body consists of an intake pipe, an outlet pipe, a pump chamber and a magnetic levitation bearing. The inlet pipe leads the gas into the pump chamber through the cylinder, and after compression by the turbine, the gas is discharged from the pump chamber and enters the downstream equipment or the atmosphere through the outlet pipe.

2. Magnetic bearings

Magnetic bearing is one of the key components of magnetic suspension turbine vacuum pump. It consists of an upper and lower part, each with a set of magnets and probes. When an electric current passes through the magnet, the resulting magnetic field attracts the probe and floats the rotor. The probe will sense the position of the rotor, generate a feedback signal, and the control system will adjust the strength of the current and magnetic field according to the feedback signal, so that the rotor can maintain a stable floating state. This magnetic levitation method not only reduces the mechanical wear of traditional bearings, but also reduces the heat and flutter generated by friction, thereby improving the efficiency and stability of the pump.

3. Turbines

The turbine is the core component of the magnetic suspension turbine vacuum pump, which is directly connected with the rotor. The gas enters the turbine through the intake pipe. Due to the high-speed rotation of the turbine, the gas is compressed and accelerated, resulting in a high vacuum. The speed of the turbine and the flow rate of the gas are the key parameters of the pump, which can be achieved by controlling the speed of the motor. The turbine is usually made of corrosion-resistant high-temperature materials, such as ceramics and alloys.

4. Cooling system

The cooling system is an important part of the magnetic suspension turbine vacuum pump, which reduces the temperature and heat of the pump by cooling the turbine and the motor. The high-speed rotation of the turbine will generate a lot of heat, which is easy to lead to gas decomposition and pollution under high vacuum conditions. Therefore, the turbine surface uses a material with similar thermal conductivity and thermal expansion coefficient, and the heat is expelled from the pump body through a cooling system. The motor also generates heat, which is easily damaged in the high temperature environment of the pump. Therefore, the motor is usually water-cooled or air-cooled to maintain the appropriate temperature.

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